JPH073309Y2 - 一体形差圧センサ - Google Patents
一体形差圧センサInfo
- Publication number
- JPH073309Y2 JPH073309Y2 JP13242188U JP13242188U JPH073309Y2 JP H073309 Y2 JPH073309 Y2 JP H073309Y2 JP 13242188 U JP13242188 U JP 13242188U JP 13242188 U JP13242188 U JP 13242188U JP H073309 Y2 JPH073309 Y2 JP H073309Y2
- Authority
- JP
- Japan
- Prior art keywords
- silicon chip
- substrate
- measurement
- diaphragm
- measurement chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 75
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 41
- 229910052710 silicon Inorganic materials 0.000 claims description 40
- 239000010703 silicon Substances 0.000 claims description 40
- 239000012530 fluid Substances 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 29
- 238000011144 upstream manufacturing Methods 0.000 claims description 5
- 230000003068 static effect Effects 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 210000002445 nipple Anatomy 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000009972 noncorrosive effect Effects 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13242188U JPH073309Y2 (ja) | 1988-10-11 | 1988-10-11 | 一体形差圧センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13242188U JPH073309Y2 (ja) | 1988-10-11 | 1988-10-11 | 一体形差圧センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0252139U JPH0252139U (en]) | 1990-04-13 |
| JPH073309Y2 true JPH073309Y2 (ja) | 1995-01-30 |
Family
ID=31389366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13242188U Expired - Lifetime JPH073309Y2 (ja) | 1988-10-11 | 1988-10-11 | 一体形差圧センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH073309Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4570149B2 (ja) * | 2005-04-05 | 2010-10-27 | 株式会社デンソー | 気体密度比検出装置、濃度検出装置及び燃料蒸気処理装置 |
-
1988
- 1988-10-11 JP JP13242188U patent/JPH073309Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0252139U (en]) | 1990-04-13 |
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